High Precision Alumina Ceramic Base Nozzle Insulator for Semiconductor Implant

1. What is a Ceramic Base Nozzle?

Our high-precision alumina ceramic base nozzle insulators are engineered specifically for semiconductor ion implantation equipment, delivering exceptional electrical insulation, ultra-high vacuum compatibility, and superior plasma resistance. These critical components ensure stable beam focusing, minimal particle generation, and extended service life in the most demanding semiconductor fabrication environments.

2. Key Properties

· Ultra-High Purity - 99.6% Al₂O₃ content minimizes contamination risks

· Excellent Dielectric Strength - >15 kV/mm for reliable electrical isolation

· Superior Plasma Resistance - Withstands aggressive plasma environments

· Ultra-High Vacuum Compatibility - Outgassing rate <1×10⁻¹⁰ Torr·L/s

· Exceptional Dimensional Stability - Maintains precision under thermal cycling

· Non-Magnetic Properties - Eliminates interference with ion beam trajectories

3. Applications

  - Ion Implantation Systems

  - Etch and Deposition Equipment

  - Metrology and Inspection

  - Vacuum Handling Systems

4. Why Choose Ceramic Over Organic Sheets?

   Reliability: Longer lifespan in harsh conditions.

   Performance: Better high-frequency signal integrity.

   Thermal Management: Critical for EVs and AI chips.

﹡Production process

1. Grind and crush the raw materials to be slurry or powder

2. se-different method to making the slurry or powder into semi-finished products

3. Put the semi-finished products into the kiln for dewaxing and sintering;

4. After forming and sintering, Ceramic Sleeves products can also be processed by subsequent CNC precision machining according to the drawing requirements. Then Q/C test.

5. Finally package Ceramic Sleeves by bubble paper or cartons and place it on tray for delivery

﹡Certifications

﹡Company

Yixing Shengda Refractory Ceramic Co, Ltd. was established in Yixing City, China in 1995, witha production area of over 10,000m2. lt is an enterprise specializing in the production of aluminaceramic,zirconia ceramic,slicon nitride, silicon carbide and other precision ceramic products. 

And we also produce ceramic band heaters, ceramic terminal block, cordierite and mullite ceramic parts an other ceramic products.

﹡Ceramic Properties