Custom Semiconductor Machinery Wafer Handling Ceramic Arm Alumina Ceramic Robotic Arm

1. The application of ceramics in semiconductors

In semiconductor processing equipment, where circuit wiring is becoming increasingly fine and multi-layered, ceramics are seeing widespread use. In lithography equipment, the adoption of lightweight, high-rigidity ceramics is on the rise. For etching and deposition systems, the use of ceramics is expanding not only in forms that offer plasma resistance and low particle generation but also in variants with high heat resistance and low dielectric loss. Wafer transfer arms, meanwhile, employ ceramics that combine high precision with excellent mechanical properties. Sapphire, valued for its optical transparency, is used in components such as windows, wafer carrier plates, wafer contact lift pins, and plasma introduction tubes.

2. Key Properties

· Ultra-High Purity - 99% Al₂O₃ content minimizes contamination risks

· Excellent Dielectric Strength - >15 kV/mm for reliable electrical isolation

· Superior Plasma Resistance - Withstands aggressive plasma environments

· Ultra-High Vacuum Compatibility - Outgassing rate <1×10⁻¹⁰ Torr·L/s

· Exceptional Dimensional Stability - Maintains precision under thermal cycling

· Non-Magnetic Properties - Eliminates interference with ion beam trajectories

3. Applications

  - Ion Implantation Systems

  - Etch and Deposition Equipment

  - Metrology and Inspection

  - Vacuum Handling Systems

﹡Production process

1. Grind and crush the raw materials to be slurry or powder

2. se-different method to making the slurry or powder into semi-finished products

3. Put the semi-finished products into the kiln for dewaxing and sintering;

4. After forming and sintering, Ceramic Sleeves products can also be processed by subsequent CNC precision machining according to the drawing requirements. Then Q/C test.

5. Finally package Ceramic Sleeves by bubble paper or cartons and place it on tray for delivery

﹡Certifications

﹡Company

Yixing Shengda Refractory Ceramic Co, Ltd. was established in Yixing City, China in 1995, witha production area of over 10,000m2. lt is an enterprise specializing in the production of aluminaceramic,zirconia ceramic,slicon nitride, silicon carbide and other precision ceramic products. 

And we also produce ceramic band heaters, ceramic terminal block, cordierite and mullite ceramic parts an other ceramic products.

﹡Ceramic Properties